HEATERS / SUBSTRATE HOLDERS
When depositing ceramic thin films, heating of the substrate is required to obtain high-quality layers. To reach these temperatures, a substrate heater can be used. When using high-pressure RHEED in a PLD-system, the substrate heater system should comply with several design requirements to yield the necessary degrees of freedom.
Twente Solid State Technology designs and produces substrate heaters that have all necessary degrees of freedom. The heaters used can be intoduced into and taken out of the system via a loadlocking principle. For systems without high-pressure RHEED a simplified design is available, making the heaters exchangeable between various systems.
The heater system consists of two parts: a heater holder and separate heaters. The heater holder is fixed in the system and can pass through a 63 CF (4-1/2" O.D.) flange. The heaters can be obtained seperately and a replacement service is available to replace the hot part when it is broken.
The heater holder can have up to five degrees of freedom, each of which can be motor driven. On the heater holder, the connections for the heating wires and a thermocouple are attached.
The separate heaters are resitively heated to temperatures of maximum 900°C. They have a flexible design allowing to fit substrates up to 25 mm or 1" diameter. The heaters can be adapted for use with RHEED-imaging.
The heaters can be introduced and taken out of the system via a simple loadlocking principle. All heaters fit the same heater holder and are easily exchangeable. Therefore, it is possible to use different heaters for different applications.
Additional Options
The system can be extended with the following options:
- A complete flange-mounted heater system, with an XYZ manipulator and a rotation feedthrough. These four axes can be equipped with stepper motors.
- Steering electronics for heating, and motion of the five axes. These electronics are modular and any combination can be selected.
- A special clamping system to facilitate the loadlocking of the heater.
- A shutter attached to the heater holder to prevent deposition during pre-ablation. (Please note that with this option the heater no longer can pass through a 63 CF flange).
Technical Specifications
- Minimum flange size: 40 CF or 2-3/4" O.D.
- Maximum substrate temperature: 900°C.
- Power requirement heater at 800°C: ~100 W, depending on the background pressure
- Flange sizes, travel lengths for the motion possibilities, and available heater surface can be adapted to fit the needs of the system and the applications.